Mirco-Electro- Mechanical Systems (MEMS)

I. Introduction Microelectromechanical systems (MEMS) are technologies related to mechanical and electromechanical devices on microscopic scale [1]. In 1959, Richard Feynman introduced the idea of ​​making small devices with a speech titled "There is enough space at the bottom". Feynman thinks that small devices can be manufactured by manipulating atoms and molecules. In 1974, Japanese scientist Norio Taniguchi defined "nanotechnology" as "material processing, separation, solidification and deformation by one atom or one molecule" [2].

A microelectromechanical system or MEMS is a technology that can define its most common form as small mechanical and electromechanical parts (ie devices and structures) manufactured using micromachining techniques . The important physical dimensions of a MEMS device can be up to several millimeters well below the 1 micron range at the bottom of the size spectrum. Thus, the type of MEMS device can vary from a relatively simple structure that does not move the element to a very complex electromechanical system with multiple moving elements under integrated microelectronic control. One of MEMS's main criteria is that at least some of the components have some mechanical function, regardless of whether they can move. The terms used to define MEMS differ in different parts of the world

Microelectromechanical systems (also known as MEMS, microelectromechanical, microelectromechanical or microelectronic and microelectromechanical systems and related MEMS) are microdevices, which in particular have moving parts. It incorporates nanoelectromechanical systems (NEMS) and nanoscale nanotechnology. MEMS is also known as micromachine in Japan and Microsystems Technology (MST) in Europe. MEMS consists of components ranging in size from 1 to 100 microns (ie 0.001 to 0.1 mm), MEMS devices typically have dimensions of 20 microns to millimeters (ie 0.02 to 0 mm) (The constituent elements are arranged in an array). Digital micromirror device) can exceed 1000 mm 2. They usually consist of a central unit (microprocessor) that processes data and several components that interact with the surrounding environment, such as a microsensor.

Modern accelerometers are typically small microelectromechanical systems (MEMS), which in fact are the simplest MEMS devices and consist only of cantilevers with proof masses. Since MEMS accelerometers are silicon micromachines, they can easily be integrated with signal processing circuits. This is different from conventional accelerometers (piezoelectric etc).

Sensorless position and speed control and application trend of brushless DC motor