Dynamic Characterization of High Frequency MEMS/NEMS Using Raman Spectroscopy

In this paper, we propose development of Raman spectroscopy system which can characterize high frequency MEMS / NEMS and device movement without surface features. Raman spectroscopy is a technique for characterizing such devices to overcome the disadvantages of laser vibrometers, strobe imaging, interferometry, electronic speckle interference, laser holography and other optical measurement techniques including blurring It is used. Synthesis The frequency of these techniques is limited to less than 30 MHz and needs to be measured along the motion line or measured using surface features.

Raman spectroscopy is a non-contact method for analyzing materials and components. Raman spectroscopy characterizes the mass of material and the amount of material. In addition, the components analyzed in biology, chemistry and pharmaceutical fields, it is used to characterize semiconductor materials, materials for gemstone and semi-precious stones, catalysts, minerals, polymers and many other materials. The Raman spectrum is based on the experimentally proven Raman effect by Indian physicist Chandrasekhara Venkata Raman in 1928. Through this discovery, Sir Raman was awarded the Nobel Prize in 1930.

Raman spectroscopy uses the Raman effect for material analysis. The spectrum of Raman scattered light depends on the existing molecular composition and its state and makes it possible to use its spectrum for identification and analysis of substances. Raman spectroscopy is used for the analysis of various materials including gases, liquids, and solids. Very complex substances such as organisms and human tissues can also be analyzed by Raman spectroscopy. For high intensity continuous wave (CW) lasers, SRS can be used to generate broadband spectra. This process can also be viewed as a special case of four-wave mixing, where the two incident photons are at the same frequency and the emission spectrum is seen in two bands separated by phonon energy from incident light. The initial Raman spectrum consists of spontaneous emission and will be expanded later

Currently, Raman spectroscopy has many uses. Many actual examples include surface enhanced Raman spectroscopy, resonance Raman spectroscopy, surface enhanced resonance Raman spectroscopy, super Raman, spontaneous Raman, coherent anti-Stokes Raman and transmitted Raman. Some of the current uses of Raman spectroscopy are at the forefront of breakthroughs and in fact Raman did not use it this way before. The application of Raman in the urology department is an example. Here it has been used to detect molecular level changes during pathological transformation of biological tissues. Raman spectroscopy has shown some promising results in the diagnosis of bladder cancer and prostate cancer in vitro. Raman shows itself as an exciting tool for real time diagnosis and in vivo evaluation of living tissue (12)